Short Courses
Monday, September 26, 2022, 13:00 – 17:30
Short Course A: 201, 2F
Short Course B: 301, 3F
A
Scaling and monolithic vs. heterogeneous integration for advanced, future technology nodes
Organizers:
Anabela Veloso
(imec)
Masaharu Kobayashi
(Univ. of Tokyo)
13:00 – 13:50
“Advanced Logic Scaling Using Monolithic 3D Integration”
Marko Radosavljević
(Intel Corp.)
13:50 – 14:40
“PPAC of 2DIC & 3DIC”
Victor Moroz
(Synopsys)
14:40 – 15:30
“Technologies for Processing‐in‐Memory”
Suman Datta
(Georgia Tech)
15:30 – 15:50
Break (20 min)
15:50 – 16:40
“System scaling enabled by 3D augmented More Moore technology: requirements and roadmap”
Mustafa Badaroglu
(Qualcomm)
16:40 – 17:30
“FEOL selective etch processes to enable advanced logic devices:
nanosheet, forksheet and complementary FETs”
Yusuke Oniki
(imec)
B
Recent advances in ultra‐wide‐bandgap semiconductors
Organizer:
Jun Suda
(Nagoya Univ.)
13:00 – 13:50
“Fundamentals and Prospects of Ultra‐Wide‐Bandgap Oxide Semiconductors: Ga
2
O
3
and Other Oxides”
Shizuo Fujita
(Kyoto Univ.)
13:50 – 14:40
“Pseudomorphic AlGaN on AlN substrates for high performance UVC LEDs and laser diodes”
Leo J. Schowalter
(Nagoya Univ./Crystal IS)
14:40 – 15:30
“AlN‐based materials and devices”
Masanobu Hiroki
(NTT)
15:30 – 15:50
Break (20 min)
15:50 – 16:40
“Diamond Semiconductor; Inch‐Wafer Growth and Power FET Technologies”
Makoto Kasu
(Saga Univ.)
16:40 – 17:30
“Diamond quantum sensing”
Takayuki Iwasaki
(Tokyo Tech)