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CORE AREAS |
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[1] Advanced
Silicon Circuits and Systems |
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(Chair, T.
Kuroda, Keio Univ.) |
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Original papers bridging
the gap between materials, devices, circuits, and systems, are solicited
in the subject areas including, but not limited to, the following: (1)
Advanced digital, analog, mixed-signal, and memory, (2) Wireless, wireline,
and optical communications, (3) Imagers, displays, and MEMS, (4) Low power
technologies and power aware systems, (5) High speed circuits and systems,
(6) Technologies for systems on a chip, (7) New concept and technologies;
based on nanoelectronics, quantum mechanics, 3D-electronics, ferroelectrics,
and photonics; using neural network, fuzzy logic, and multi-valued logic;
and for bio-medical and microfluidic applications.
Invited speaker:
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"Silicon
Integration of UWB: Choices and Challenges"
S. Narendra (Intel, USA) |
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[2] Advanced
Silicon Devices and Device Physics |
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(Chair, T. Mogami,
NEC) |
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The scope of this
subcommittee covers all aspects of advanced silicon devices and device
technologies for circuit applications. Papers are solicited in the following
areas: (1) Sub-100nm silicon CMOS devices and their integration technologies
including logic, memory and merged logic/memory LSIs, (2) Post-CMOS silicon
device structure including vertical device and strained-silicon channel
device, (3) New concepts, theories and breakthroughs in silicon-related
devices, passive device and other functional devices, (4) Physics and
reliability for advanced processes/devices including simulation and modeling
and (5) Manufacturing and yield issue.
Invited speakers:
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"Dual workfunction
metal-gate FinFET devices fabricated using total gate silicidation"
J. Kedzierski (IBM, USA) |
"Integration
Issues of HfO2-Al2O3 Laminate for Gate and Capacitor Dielectric"
H.K. Kang (Samsung, Korea) |
"Searching
for serendipitous gate dielectric, high-k or silicon oxynitride"
M. Hiratani (Hitachi, Japan) |
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[3] Silicon
Process / Materials Technologies |
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(Chair, N. Kobayashi,
Selete) |
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The session consists
of advanced process and materials technologies for Si ULSI applications.
Strongly encouraged are the topics of material innovations to improve
device performance, manufacturability, and cost-efficiency. Papers are
solicited in, but not limited to, the following areas: (1) Novel materials
technologies such as high-k and ultra-low-k process to break through the
scaling limitations of Logic, Memory and New-concept devices (2) Key process
technologies to integrate sub-90nm Si ULSIs such as gate oxide integrity,
ultra-shallow junction and Cu/low-k processes (3) Critical reliability
issues related with advanced FEOL and BEOL processes including packaging.
Invited speakers:
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"Stress
Migration Phenomena of Copper Interconnects" (tentative)
T. Oshima (Hitachi, Japan) |
"Recent
material and process development for FeRAM applications" (tentative)
Y. Horii (Fujitsu, Japan) |
"Mobility
in high-k dielectric based field effect transistors"
L. Ragnarsson (IMEC, Belgium) |
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[4] New Materials
and Characterization |
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(Chair, S. Takagi,
Toshiba) |
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Introduction and utilization
of new materials are expected as a key concept for further evolution and
functionarization of Si-based logic and memory LSIs. Also, novel characterization
techniques are indispensable in realizing these advance devices. Papers
are solicited in the following areas (but not limited to these subjects):
(1) Characterization and processing of group-IV semiconductors, high-k
and low-k dielectrics and other new materials, including diamond, silicides
(germanides), nano-tubes, fullerence and any other materials applicable
to Si-based LSIs, (2) Physics and chemistry of surface and interface phenomena
(including oxidation and nitridation), (3) Reliability physics and failure
analysis of gate oxides and interconnect systems, (4) New characterization
method for devices and materials including in-situ monitoring and nanometer-scale
characterization. Submission of papers at a germinal stage is also encouraged.
Invited speakers:
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"SiGe in
Advanced CMOS devices - unique material equally helpful when present
or absent"
T. Skotnicki (ST Microelectronics, France) |
"Dual Gate
Electrodes Materials for Advanced Silicon CMOS Devices"
V. Misra (North Carolina State Univ., USA) |
"Nanoelectronics:
carbon nanotubes and molecular devices"
H.-S.P. Wong (IBM, USA) |
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[5] Compound
Semiconductor Materials and Devices |
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(Chair, N. Kobayashi,
NTT) |
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Compound semiconductors
are the key materials supporting the highly information oriented society.
This area deals with III-V, II-VI compound semiconductors including wide
gap GaN and ZnO, and magnetic semiconductors.
The materials also includes other compound semiconductors such as SiC,
FeSi2 and so on. Compound Semiconductor Materials and Devices besides
covers the following areas (but not limited): (1) Growth and characterization,
(2) Heterostructures and superlattices, (3) Optical devices (LEDs, LDs
and detectors) and electron devices (HFETs and HBTs), their device processing
and reliability.
Invited speakers:
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"High efficiency
large area GaN-based light emitting diodes"
J.-I. Chyi (National Central Univ., Taiwan) |
"MOVPE Growth
of InN and its Optical Characteristics"
T. Matsuoka (NTT, Japan) |
"Ultrahigh
Performance InP HEMTs"
A. Endoh (Fujitsu, Japan) |
"Optical
and Electrical Control of Ferromagnetism in II-VI Quantum Wells"
T. Dietl (Polish Academy of Sciences, Poland) |
"Type-II
InAs-based quantum cascade lasers"
K. Ootani (Tohoku Univ., Japan) |
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[6] Optoelectronic
Devices and Photonic Crystal Devices |
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(Chair, O. Wada,
Kobe Univ.) |
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Towards ubiquitous
communication and computing, optoelectronic devices are expected to explore
novel functions and enhance performance by utilizing novel device physics
and developing advanced fabrication techniques. The scope of this subcommittee
covers all aspects of emerging technologies in active, passive, and integrated
optoelectronic and photonic devices, which includes (1) laser diodes,
LEDs, photodetectors, SOAs, and OEICs, (2) photonic crystal materials
and novel functional devices, (3) optical switches, modulators, and MEMS,
(4) optical wavelength converters, nonlinear optical devices, and all-optical
switches, (5) waveguide components, PLCs and integrated photonic circuts,
(6) material and device processing and characterization techniques, (7)
hybrid and monolithic integration, packaging and moduling, and (8) optical
communication, interconnection and signal processing applications of optoelectronic
and photonic devices.
Invited speakers:
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"SOA-based
functional devices for future optical networks"
M.L. Nielsen (Technical Univ. of Denmark, Denmark) |
"3D Photonic
Crystal as a Novel Dielectric Material"
S. Kawakami (Tohoku Univ., Japan) |
"Semiconductor
2D photonic crystal devices"
T. Baba (Yokohama Natl. Univ., Japan) |
"Monolithic
PD-EAM Optical Gates for Ultrafast Signal Processing"
S. Kodama (NTT, Japan) |
"1.3μm
GaInNAs(Sb) VCSELs"
A. Kasukawa (The Furukawa Electric, Japan) |
"Advances
in widely tunable optical transmitters"
L.A. Coldren (Agility Communications, USA) |
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[7] Novel Devices,
Physics, and Fabrication |
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(Chair, K. Ishibashi,
RIKEN) |
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The aim of this subcommittee
is to explore novel devices and physics, mainly in nanoscale, with inorganic
and molecular materials. Papers are solicited in the following areas,
but not limited to: (1) quantum phenomena in nanoscale, (2) quantum dots
and single electron devices, (3) solid state quantum computing, (4) spintronics,
(5) new nanoscale materials such as carbon nanotubes, (6) molecular electronics,
(7) other novel devices such as small superconducting device and resonant
tunneling device. (8) nanofabrication, nanomechanics and characterization
techniques in nanoscale.
Invited speakers:
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"Quantum
Oscillations in Two Coupled Charge Qubits"
Y. Pashkin (NEC, Japan) |
"Carbon
Nanotube SPM Probe Fabricated by NanoEngineering"
S. Akita (Osaka Pref. Univ., Japan) |
"Nanoimprint
Lithography -An Enabling Engine to Nanotechnology"
S.Y. Chou (Princeton Univ., USA) |
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[8] Quantum Nanostructure
Devices and Physics |
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(Chair, Y. Hirayama,
NTT) |
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The field covers recent
progress in physics, fabrication, characterization and device applications
of nanostructures. The main topics includes (1) growth and processing
of quantum dots and nanostructures. (2) transport/optical properties and
THz/Femto-second dynamics (3) nanometer-scale characterization such as
SPM and SNOM (4) nano electronic/optical devices (5) novel nanostructures
and nanomaterials such as photonic crystals and magnetic nanostructures.
(6) spin and carrier control in quantum nanostructures.
Invited speakers:
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"Electronic
and photonic devices via one-dimensional stacking of quantum structures"
L. Samuelson (Lund Univ., Sweden) |
"Nuclear
spin dependent transport in quantum dots"
K. Ono (Univ. of Tokyo, Japan) |
"A Light
Emitting Diode for Single Photons"
A. Shields (Toshiba Cambridge, UK) |
"Control
of ferromagnetic order in selectively p-doped GaMnAs-based heterostructures"
M. Tanaka (Univ. of Tokyo, Japan) |
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[9] Silicon-on-Insulator
Technologies |
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(Chair, A. Ogura,
NEC) |
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SOI technology today
is rushing onto the commercial market while still being considered as
a basic structure for achieving the ultimate Si devices. Moreover, new
structures based on SOI are also appearing such as partial SOI, SON (Si
on nothing), SGOI (SiGe on insulator) and SSOI (strained-Si on insulator).
This subcommittee covers the whole field of SOI and SOI-related new technologies
in a wide range of interests from circuit design to material issues. The
topics will include, but not be limited to: (1) SOI Circuit Technology
and LSI Applications (High Speed, Low Power Consumption, RF, Analog/Linear,
etc.), (2) New Structure Devices (Double, Triple, Quadruple Gate, FINFET,
Vertical Channel, Quantum, Strained Channel, Multi-Layer Devices, etc.),
(3) Process Issues for Device Manufacturing (Isolation, Silicidation,
Metal Gate, Plasma Damage, etc.), (4) Physics and Modeling of SOI Device/Process
and Circuits (floating-body effect, self-heating, etc.), (5) SOI Materials
Characterization and Manufacturing, and (6) Reliability Issues (Hot Carrier
Injection, GOI, Radiation Effects, ESD, etc.).
Invited speakers:
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"FinFET
Promise and Challenges"
T.-J. King (Univ. of California, USA) |
"Strained-Si
on SOI MOSFETs"
J.J. Welser (IBM, USA) |
"Quality
comparison of commercial silicon-on-insulator wafers by photoluminescence"
M. Tajima (Inst. of Space and Astronautical Science, Japan) |
"Ultralow-power
CMOS/SOI Circuit Technology for Ubiquitous Communications"
Y. Kado (NTT, Japan) |
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