Satellite Workshop
~ Current Status and Future of Plasma Process ~

Monday, September 2, 2019
IB Building 2F, IB Lecture Hall

Conference registration includes the admission to Satellite Workshop, too.
Only those who do not have conference registration are charged Registration Fee for the Satellite Workshop.

Plasma processing is an indispensable technology in the production of semiconductor devices such as ultra-large scale integrated circuits (ULSI) and power MOSFETs. For example, advanced devices such as 3D memories, FinFETs, and so forth, cannot be realized without the evolution of plasma processes. On the other hand, plasma diagnostic techniques and control technologies developed in the semiconductor field are applied to new fields in recent years. From biochips/biosensing to the automotive/aerospace fields, as well as medical, agricultural and fisheries applications of plasma, plasma is a driving force for creating various interdisciplinary areas. Furthermore, attempts to understand and control plasma processes using computer simulation and AI technology have attracted much attention. In this workshop, six researchers review each aspect of plasma technology. This workshop provides an opportunity to understand current status and see the future of the plasma process.

  • 13:00
  • 13:10
    “Leading Edge of Plasma Process Research”
    Masaru Hori
    (Nagoya Univ.)
  • 13:40
    “Current Status and Future Direction of Plasma-Enhanced Atomic Layer Deposition and Etching”
    Nobuyoshi Kobayashi
    (Nagoya Univ.)
  • 14:10
    “Advanced Plasma Etching for the State-of-the-Arts Memories”
    Hisataka Hayashi
    (Toshiba Memory Corp.)
  • 14:40
    --- Break ---
  • 15:00
    “Machine Learning Approaches for Optimizing Plasma Process and Tool Performances”
    Munehito Kagaya
    (Tokyo Electron Technology Solutions Ltd.)
  • 15:30
    “Plasma-on-Chip for Biological Application: A Microdevice for Stimulating Single Cell with Non-Thermal Atmospheric Pressure Plasma”
    Shinya Kumagai
    (Meijo Univ.)
  • 16:00
    “Plasma Process for Automobile Component Area”
    Takashi Aoki
    (DENSO Corp.)
  • 16:30
  • 17:00
    Laboratory Tour