Monday, September 2, 2019
IB Building 2F, IB Lecture Hall
Conference registration includes the admission to Satellite Workshop, too.
Only those who do not have conference registration are charged Registration Fee for the Satellite Workshop.
Plasma processing is an indispensable technology in the production of semiconductor devices such as ultra-large scale integrated circuits (ULSI) and power MOSFETs. For example, advanced devices such as 3D memories, FinFETs, and so forth, cannot be realized without the evolution of plasma processes. On the other hand, plasma diagnostic techniques and control technologies developed in the semiconductor field are applied to new fields in recent years. From biochips/biosensing to the automotive/aerospace fields, as well as medical, agricultural and fisheries applications of plasma, plasma is a driving force for creating various interdisciplinary areas. Furthermore, attempts to understand and control plasma processes using computer simulation and AI technology have attracted much attention. In this workshop, six researchers review each aspect of plasma technology. This workshop provides an opportunity to understand current status and see the future of the plasma process.