Laboratory Tour
~ CIRFE Transformative Electronics Facilities (C-TEFs) ~

Monday, September 2, 2019
Open : 13:30 to 19:00
It takes 20 min in tours

Pre-registration is not necessary.
Conference registration includes the participation in Lab tours, too.


The Center for Integrated Research of Future Electronics - Transformative Electronics Facilities (C-TEFs) is an experimental facility of IMaSS at Nagoya University. It has a large clean room of about 1,000 m2 (Class 1,000 exposure area; Class 10,000 process area) for conducting accelerated crystal growth, device processes, and evaluation in GaN research and development.

  • (1) Submicron processing line specialized for GaN Electronics
    • Complete end-to-end process of GaN power devices from crystal growth to device fabrication
    • Equipment capable of submicron feature fabrication, including an i-line stepper
    • Operation management and contract fabrication services by technical development staff
    • Shared user facility system with fee structure to allow use by outside organizations
  • (2) Target device
    • GaN-on-GaN vertical power device
    • GaN-based optical device
    • AlGaN/GaN lateral HEMT device
    • GaN future device

How to join Lab. tours

A shuttle bus departs in front of a welcome meeting place (ES bldg.) every 20 minutes.
Because it takes more than 15 minutes on foot, we recommend using a shuttle bus.

Lab. tours map